Liners/ Crucibles for Electron Beam Evaporation

RINGSDORFF® Graphite for EBE Liners/ Crucibles

Wafers for power electronics are further processed by using electron beam evaporation as a coating process. We supply standard products and customized solutions for various plant types.

Liners for electron beam evaporation are made of high-density graphite with a low open pore volume and high reaction inertia. SGL Group has developed graphite grades that meet these requirements.

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  • Materials and Products Made of Graphite and Carbon Fiber-Reinforced Carbon for the Semiconductor Industry

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