Coating Carriers for Semiconductor and Solar Applications

Key requirements to ensure a long service life for PECVD carriers are high mechanical strength and purity, as well as a dense material structure to minimize plasma erosion.

SGL Group has developed graphite materials that meet these requirements.

All commonly used carrier types are available with a high surface quality and evenness and/or a roughened surface as specified.

On request, the carrier can be supplied with pyrographite or silicon carbide coating.Large C/C carriers are frequently needed in solar cell production.
Graphite plates of high purity are needed for special systems.