Products for LED chip production in MOCVD reactors:

Susceptors/carriers, lids, rings and satellites

SIGRAFINE® wafer carrier for LED chip production in MOCVD reactors

During the extensive coating process in the MOCVD reactor, the substrate wafers are carried by rotating susceptors, also known as plates. The properties of the susceptor material have a key influence on coating quality and therefore on the chip reject rate.

Our SiC coated susceptors help ensure efficient manufacture of high-quality LED wafers with low wavelength deviation. Many important factors contribute to this, such as the very high purity and uniform thermal conductivity of both our isostatic graphite and the SiC coating. We use specially selected graphite grades for our susceptor plates. High-precision machining and homogeneous coating ensure that the wafer carrier pockets have a uniform profile and the susceptors have high flatness. Thanks to our exhaustive quality controls, we offer our customers top-quality products that are fully traceable.

We are also continually developing our materials and components further in close collaboration with manufacturers and operators of MOCVD units. Together we want to increase chip yield in the production of LED wafers and further minimize wavelength deviation. Besides susceptors, we also supply other graphite components for all current MOCVD reactors. And nearly every component can be SiC coated, even with diameters of more than 1 m.

Application-specific specialty graphites for MOCVD reactors

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